CVD-SiC coated graphite susceptors and process carriers for MOCVD, epitaxy, wafer handling, and contamination-sensitive semiconductor furnace interfaces.
| Metric | Typical Range | Why It Matters |
|---|---|---|
| Coating Route | CVD SiC on isostatic graphite by RFQ | A dense coating reduces direct graphite exposure, particle risk, and corrosive gas attack in epitaxy environments. |
| Wafer Pocket Geometry | Defined by wafer size and equipment interface | Pocket flatness, support points, and balance affect wafer seating and thermal uniformity. |
Decision fit
Epitaxy process engineers and equipment maintenance teams replacing coated graphite susceptors by drawing.
Primary proof point
CVD SiC on isostatic graphite by RFQ
A dense coating reduces direct graphite exposure, particle risk, and corrosive gas attack in epitaxy environments.
RFQ trigger
| Decision Gate | What Buyers Should Check | Acceptance Evidence |
|---|---|---|
| Use-case fit | SiC and GaN epitaxy wafer support; MOCVD susceptors, carriers, and chamber graphite parts; High-temperature semiconductor furnace interfaces where particle control matters | Application, furnace duty, and buyer-side validation goal are confirmed before material or process route selection. |
| Parameter baseline | Coating Route: CVD SiC on isostatic graphite by RFQ; Wafer Pocket Geometry: Defined by wafer size and equipment interface | Target ranges, report needs, and pass/fail criteria are written into the RFQ or sample approval plan. |
| Risk closure | Coating pinholes or exposed graphite: Define coating thickness, surface map, cleaning method, and inspection criteria before sample approval.; Wafer seating mismatch: Confirm equipment interface, pocket depth, flatness, pins, and rotation features against the drawing. | Drawing notes, inspection scope, cleaning, coating, packaging, and traceability controls are agreed before repeat supply. |
| RFQ completeness | Susceptor or carrier drawing with wafer pocket and interface dimensions; Base graphite grade, coating material, and coating thickness target; Equipment model, process gases, cleaning method, and temperature window; Coated and uncoated surface map with inspection acceptance criteria | Engineering can return a quote direction without avoidable loops for drawing, purity, coating, quantity, or delivery gaps. |
Confirm furnace duty, drawing revision, target purity, operating atmosphere, and replacement cycle before material selection.
Match isostatic graphite grade, purification depth, coating route, and machining allowance to the process risk.
Machine graphite bodies, lids, rings, heaters, carriers, and insulation interfaces against the approved drawing pack.
Align dimensional checks, purity report format, cleaning, vacuum sealing, cushioning, and crate requirements before shipment.
Review how crucibles, hot-zone parts, and insulation fit a PVT growth workflow.
Check the factory workflow for drawing-based graphite part production.
Align inspection reports, sealing, cushioning, and export crate expectations.
Open the related page to continue technical qualification.
Open the related page to continue technical qualification.
Inquiry Email
Attach DWG, STEP, or PDF drawings and include purity, tolerance, quantity forecast, and delivery country.
Instant Chat
WhatsApp Engineering Support
Use WhatsApp for quick engineering clarification before a formal quote.
Yes. Send the drawing, equipment interface, coating target, cleaning method, and any observed wear or particle issues.
The coating plan must be reviewed together with substrate grade, surface preparation, coated surfaces, and acceptance inspection, not just the machined geometry.
